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超快雷射的發展與應用使得雷射加工有了新的發展方向。該項技術透過單光
子離子化、多光子離子化的原理，使得能夠加工各種透明與非透明材料，並且具 有熱影響區較小與精密度較高的優點。
然而，現實環境中充滿各種影響雷射指向性穩定的因子，舉凡機械震動、空
氣擾動、溫濕度變化…等因素，皆可能成為在應用飛秒雷射進行高精密加工時造 成精密度誤差的原因。
故本論文的研究目的在於透過觀察加工時的雷射指向性與加工結果之關係，
評估在進行雷射加工時指向穩定性對於加工結果之影響。隨後透過使用本論文中
所建立的雷射指向穩定系統中的快速轉動鏡組製造可人為控制之擾動，觀察加工
結果與擾動性之關係，以期能夠作為出未來相關領域使用雷射指向穩定性進行加 工之評估參考。
關鍵字：飛秒雷射加工;高重複頻率奈焦耳飛秒雷射;雷射指向穩定系統;快速反射鏡組;雷射脈衝偵測器;指向性分析;鍍聚合物玻璃
The development of ultra-fast
technology has given a brand new approach in laser fabricating
applications. With this technology featuring with the principles
of single photon absorption and multi-photon absorption,
machining any kind of transparent or opaque materials is now
available and has superior advantages of small thermal effected
zone and high machining precision. In real world, however, there
are kinds of factors that may be able to degrade the laser
pointing stability, such as mechanical vibration, air flow
disturbance, variation in ambient temperature and humidity, etc.
Those factors may degrade the precision in ultra-fast laser
fabrication. The main purpose in this thesis is to observe the
correlation of laser pointing stability and laser fabrication
result and make an assessment of influence of laser instability
in ultra-fast laser fabrication regime. Moreover, with the
adjusted laser pointing stabilization system in this work,
finding the relationship of laser pointing instability with
machining result by making worse laser pointing condition with
the fast steering mirror in the system is the second objective
in this thesis. With the relation of laser pointing and laser
machining result, it may provide a newreference to those want to
build up a laser pointing stabilization system in ultra-fast
laser fabricating regime.
Keywords: femtosecond laser
machining; high-repetition rate femtosecond laser; laser
pointing stabilization system; laser position sensing detector;
pointing analysis; polymer
coated glass
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