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摘要
隨著半導體技術和製造工藝的進步，Micro LED技術展現出顯著的優勢，但其商業化仍面臨巨量轉移技術的挑戰。龍門結構機台在Micro
LED製程中的應用具備巨大潛力，其結構剛性高可滿足巨量轉移技術的精度需求。拱門式的結構使得龍門機台擁有較大的工作區域，雙驅動元件進行驅動，使其有較大的推力與頻寬。然而，雙驅動元件運動不同步時，會導致製造精密度下降，並減少設備壽命。因此，消除同步誤差是龍門機台的一個重要技術議題。
本研究建立了無撓性接頭(後續將簡稱為剛性接頭)和撓性接頭兩種龍門結構的物理與數學模型，以模型計算其受控體(Plant)頻率響應函數(Frequency
Response Functions , FRFs），並與實際龍門機台Plant
FRFs進行對比，驗證模型的準確性。隨後將Plant FRFs代入MMC與新式CCC同動控制架構中，透過模擬分析不同接頭與不同控制架構間的性能差異，以及探討其原因，並在實際機台上進行實驗驗證。
透過實驗的頻域與時域分析，驗證了本研究模型的可行性。剛性接頭憑藉其高旋轉剛性，能夠有效抑制和修正同步誤差。然而，由於其高剛性，在同步誤差產生時，機台結構間會承受極大的接觸力。相比之下，撓性接頭因其低旋轉剛性，使該結構能大幅降低同步誤差產生時機台結構間承受的接觸力，使旋轉控制相較於剛性接頭更優秀。撓性接頭在CCC與MMC的直線運動中，會有相同的頻寬，同步誤差抑制方面，CCC的旋轉控制能夠有效地抑制同步誤差，這使得CCC在整體性能上更具優勢。
關鍵宇：龍門結構、撓性接頭、同動控制、同步誤差
Abstract
With advancements in semiconductor technology and manufacturing
processes, Micro LED technology demonstrates significant advantages.
However, its commercialization still faces challenges with the mass
transfer technology. Gantry stage machines have great potential in the
Micro LED fabrication process due to their high structural rigidity,
which meets the precision requirements of mass transfer technology.
The arch structure of the gantry stage provides a large working area,
and dual drive elements enable it to achieve significant thrust and
bandwidth. However, when the dual drive elements are not synchronized,
it can lead to decreased manufacturing precision and reduced equipment
lifespan. Therefore, eliminating synchronization errors is a critical
technical issue for gantry stage machines.
This study
establishes physical and mathematical models for two types of gantry
structures: one with rigid joints (hereafter referred to as rigid
joints) and one with compliant joints. The frequency response
functions (FRFs) of these models were calculated and compared with the
actual FRFs of the gantry stage to verify the accuracy of the models.
Subsequently, the Plant FRFs were incorporated into MMC and new CCC
synchronous control architectures. Through simulation, the performance
differences between the different joints and control architectures
were analyzed, and the underlying reasons were explored. Experimental
verification was then conducted on an actual gantry stage.
Experimental
frequency and time-domain analyses validated the feasibility of the
proposed models. The rigid joints, with their high rotational
rigidity, effectively suppressed and corrected synchronization errors.
However, due to their high rigidity, significant contact forces are
generated between the machine structures when synchronization errors
occur, reducing the machine's lifespan. In contrast, compliant joints,
with their low rotational rigidity, significantly reduce the contact
forces between machine structures during synchronization errors,
resulting in better machine lifespan and rotational control compared
to rigid joints. The compliant joints demonstrated the same bandwidth
in linear motion for both CCC and MMC. In terms of synchronization
error suppression, the rotational control of CCC effectively
suppressed synchronization errors, making CCC more advantageous in
overall performance.
Key words:
Gantry control, Flexible joint, Coordinated control, Synchronization
error
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