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摘要
隨著全球半導體產米對產品的要求有尺寸越小及精度越高之趨勢，其製造典檢测方法連帶影響其附屬之相關產業，由於客戶需求之檢測設備需要在保證精度的同時能夠快速的完成任務，因此設備之振動行為與糸統控制是工程師在調適設備時的一門重要課題。
本研究利用有限元素法(Finite Element
Method)建立點測機之模型並計算其模態響應，擬合衝擊槌對寳際設備進行激振後量測之響應完成對機械糸統的驗證並分析其模態，再利用 MATLAB
模擬實際控制器的輸入輸出行為驗證控制系統，最終結合訊號處理之技術，預測系統任意兩點間之相對位移，從而對系統調控並改善其振動行為、提高點測精度與速度和降低所需成本。
透過對實驗與模擬頻域及時域訊號進行分析，驗證模型之可行性，並成功找到對系統危害較大之模態如載台調整座之彎取興扭轉模態及其對應頻率分別為151 Hz 奥
353 Hz，並針對該模態找到相對應的問題並進行調控，最終透過模擬驗證該調控之可行性並改善其振動量。
關鍵宇：系統驗證、模態分析、有限元素法
Abstract
As the global semiconductor industry requires products with
smaller size and
higher precision, its manufacturing and testing methods will
affect its related industries
The testing equipment required by customers' needs to be able
to quickly complete
tasks while ensuring accuracy. Therefore, the vibration
behavior and system control of
equipment is an
important subject for engineers when adjusting equipment.
This research will use the Finite Element Method to establish
the model of the spot
testing machine and calculate its modal response, fit the
impact hammer to excite the
actual equipment and measure the response to complete the
verification of the
mechanical system and analyze its modal response. Then use
MATLAB to simulate the
input and output behavior of the actual controller to verify
the control system, and finally combine the technology of signal processing
to predict the relative displacement
between any two points of the system, so as to control the
system and improve its
vibration behavior, improve the accuracy and speed of point
measurement and reduce
costs.
By analyzing the experimental and simulated frequency domain
and time domain signals, the feasibility of the model is verified, and the
mode and its corresponding
frequency that are more harmful to the system
are successfully found, and the
corresponding problems are found and regulated for the mode.
The feasibility of the
regulation is verified by simulation and the
vibration quantity is improved.
Keyword：System
Validation , Modal Analysis ,
Finite Element Method
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