摘要

    本研究針對氣囊式拋光機的材料移除形式建立一理論模型作深入探討與研究，藉由數控拋光機台為Zeeko IRP 1000並搭配LP66拋光墊實際拋光實驗與表面分析，研究各參數設定對於表面材料移除效果之影響，進而透過歸納分析提出材料移除函數模型的修正，最終以材料移除函數模型計算形貌誤差修正之拋光加工策略。首先以Preston equation建立理論材料移除函數模型，並以赫茲接觸作為其中壓力分布之建立理論，速度分布以動力學做分析計算，材料移除函數模型之等效材料參數則經由動態下壓力實驗確認。再透過實驗與模擬的分析比較得出普利斯常數( Preston’s coefficient )，在不同的進給速率下，其計算出的值平均值為6.02 ，為一個常數。 值設定後，最終以確立材料移除函數模型之建立。

        實驗證明拋光策略之規劃中需考慮材料移除函數之疊加所造成的效應，形貌誤差修正實驗將針對材料移除函數之疊加影響作探討，並重新規劃拋光策略之計算，再以一形貌誤差修正實驗驗證。本次實驗結果與模型模擬之最大深度差值為0.1236 um，實驗之材料移除深度值約達總模擬數值的85%以上，即代表實驗值能達到85%以上的拋光模型效果預測，證明本研究建立之材料移除函數模型確實是可以呈現參數設定之拋光效果。

關鍵字：精密數控拋光、氣囊式拋光技術、刀具影響函數、材料移除函數模型

Abstract

     This study presents a simulation model to predict material removal functions based on the Preston equation and the bonnet polishing experimental observations, carried out on Zeeko IRP 1000 with LP66 polishing pad. The model is served to program the polishing strategy for surface error corrections, and hence improving the processing results for high-end glass lenses requirement.

     In this thesis, the material removal functions are simulated based on the Preston equation. The velocity distribution is derived from the geometry of the polishing motion. The pressure distribution at the polishing spot is based on the results by Hertz contact theory. In the study the material properties are firstly validated by a series of dynamics press force experiments with a load cell. Preston’s coefficients of the modeling are obtained by the correlation between polishing parameters experimental and modeling results.

     The experimental results show that the effect of the superposition of the material removal function is necessary to be taken into consideration in the polishing strategy. The material removal depths as measured from experimental are found to be 85% of simulated results. In general, the estimation in the model agrees well with experiments, and the polishing effects can be well presented by the set parameters when the proposed material removal function model is suitably applied.